Adhesion and Removal of Fine Particles on Surfaces, Aerosol Science and Technology, vol.8, issue.2, pp.161-176, 1987. ,
DOI : 10.1016/0001-8686(81)80007-3
Evaluating the feaeability of dry cleaning of silicon wafers Microcontamination, pp.39-43, 1988. ,
Procédures for cleaning and decontamination of eolid surfaces in pharmacy ICCS 90, pp.10-14, 1990. ,
Cloaning techniques for wafer surfaces Semi-conductor International, Col, pp.81-85, 1987. ,
The efficiency of ultrasonic cleaning Plating and surface finishing, pp.63-70, 1985. ,
Aérosol génération using fluidieed bode In, pp.173-193, 1976. ,